Authors
D. Bedrane, A. Houël, A. Delobbe, M. Lagaize, Philippe Dumas, S. Veesler, E. Salançon
- Bibliographic Reference
- D. Bedrane, A. Houël, A. Delobbe, M. Lagaize, Philippe Dumas, et al.. Coaxial ion source: Pressure dependence of gas flow and field ion emission. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2023, 41 (4), ⟨10.1116/6.0002795⟩. ⟨hal-04191019⟩
- DOI
- https://doi.org/10.1116/6.0002795
- HAL Collection
- ['CNRS - Centre national de la recherche scientifique', 'Aix Marseille Université', 'Centre Interdisciplinaire de Nanoscience de Marseille']
- HAL Identifier
- 4191019
- Institution
- Aix Marseille Université
- Laboratory
- Centre Interdisciplinaire de Nanoscience de Marseille
- Published in
- France