Cheol Seong Hwang Cha Young Yoo Editors - Atomic Layer

While the advice and information in this book are believed to be true and accurate at the date of publication, neither the authors nor the editors nor the publisher can accept any legal responsibility for any errors or omissions that may be made. [...] Secondly, in principle, once the substrate surface is covered with the first mono-layer of the growing film, the growth should be in the steady-state, suggesting that the film 1 Introduction 5 recovers the bulk-like properties from thicknesses as thin as\* 1 nm. [...] The diverse structures and operational principles of semiconductor devices might be difficult to understand for surface scientists, while the engineers and designers in the solid-state device field may have problems in understanding the chemistry- oriented ALD reactions and materials properties. [...] Depending on the relative magnetization directions of the two magnetic layers, the electrical conduction which occur via the tunneling mechanism through the thin dielectric layer modulates, which is the basic principle of the MRAM or STTRAM. [...] Due to the extremely high sensitivity of the tunneling current on the dielectric layer thickness, very tight control (\0.1 nm) over the dielectric layer thickness throughout the large area wafer is crucial.